Specific Process Knowledge/Lithography: Difference between revisions
mNo edit summary |
|||
| Line 239: | Line 239: | ||
DTU Nanolab offers a Tool Package Training for Lithography (TPT Lithography). You are required to pass this course, in order to get access to the lithography equipment inside the DTU Nanolabs cleanroom facility. The course includes theory on lithographic processes and training videos for equipment operation. The theory part consists of lecture videos followed by quizzes for each section. Once completed successfully, you can do the online training that explains the operation for the specific lithography equipment you want to use in more detail. After completing the online training, you can request hands-on training for the equipment inside the cleanroom via [mailto:training@nanolab.dtu.dk training@nanolab.dtu.dk]. | DTU Nanolab offers a Tool Package Training for Lithography (TPT Lithography). You are required to pass this course, in order to get access to the lithography equipment inside the DTU Nanolabs cleanroom facility. The course includes theory on lithographic processes and training videos for equipment operation. The theory part consists of lecture videos followed by quizzes for each section. Once completed successfully, you can do the online training that explains the operation for the specific lithography equipment you want to use in more detail. After completing the online training, you can request hands-on training for the equipment inside the cleanroom via [mailto:training@nanolab.dtu.dk training@nanolab.dtu.dk]. | ||
The course is available via DTU Learn. You sign up for the course by enrolling yourself in the course here. | The course is available via DTU Learn. You sign up for the course by enrolling yourself in the course [https://www.nanolab.dtu.dk/access/cleanroom-access/equipment-training/lithography-tool-training here]. | ||
'''Course Description''' | '''Course Description''' | ||
| Line 260: | Line 260: | ||
* Resist, substrates and pre-treatment | * Resist, substrates and pre-treatment | ||
* Post-lithography steps | * Post-lithography steps | ||
=Knowledge and Information about Lithography= | =Knowledge and Information about Lithography= | ||