Specific Process Knowledge/Lithography/EBeamLithography: Difference between revisions
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After image acquisition the images can be semi automatically processed with ProSEM to determine feature sizes. For large image sets the software can generate an Excel sheet with various dimension outputs. | After image acquisition the images can be semi automatically processed with ProSEM to determine feature sizes. For large image sets the software can generate an Excel sheet with various dimension outputs. | ||
=EBL process examples= | |||
Process examples and results can be found on this page. | |||
= Literature on E-beam Lithography = | = Literature on E-beam Lithography = | ||