Specific Process Knowledge/Lithography: Difference between revisions
| Line 110: | Line 110: | ||
!Substrate size | !Substrate size | ||
| | | | ||
*small samples, down to | *small samples, down to 3x3 mm<sup>2</sup> | ||
*50 mm wafers | *50 mm wafers | ||
*100 mm wafers | *100 mm wafers | ||