Specific Process Knowledge/Lithography/Coaters: Difference between revisions
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|style="background:LightGrey; color:black"|Coating thickness | |style="background:LightGrey; color:black"|Coating thickness | ||
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* AR-P 6200.09 (CSAR): | * AR-P 6200.09 (CSAR): 170-500 nm | ||
* AZ 5214E: 1.5-5 µm | * AZ 5214E: 1.5-5 µm | ||
* AZ MiR 701: 1.5-4 µm | * AZ MiR 701: 1.5-4 µm | ||
* AZ 4562: 5- | * AZ 4562: 5-25 µm | ||
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!style="background:silver; color:black" align="center" valign="center" rowspan="5"|Process parameters | !style="background:silver; color:black" align="center" valign="center" rowspan="5"|Process parameters | ||