Specific Process Knowledge/Lithography: Difference between revisions
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|Pattern transfer via UltraViolet (UV) light | |Pattern transfer via UltraViolet (UV) light | ||
|Pattern transfer via DeepUltraViolet (DUV) light | |Pattern transfer via DeepUltraViolet (DUV) light | ||
| | |Patterning by electron beam | ||
|Pattern transfer via hot embossing(HE) | |Pattern transfer via hot embossing(HE) | ||
|Direct writing via IR laser | |Direct writing via IR laser | ||