Jump to content

Specific Process Knowledge/Lithography: Difference between revisions

Taran (talk | contribs)
Taran (talk | contribs)
Line 176: Line 176:
=Equipment Pages=
=Equipment Pages=


{| style="color: black;" width="100%"
==[[Specific Process Knowledge/Lithography/UVLithography|UV Lithography]]==
| colspan="2" |
|-


| style="width: 50%"|
{| style="color: black;" width="50%"
 
{| style="color: black;" width="100%"
| colspan="2" |  
| colspan="2" |  
|-
|-
| style="width: 40%"|
| style="width: 40%"|
==[[Specific Process Knowledge/Lithography/UVLithography|UV Lithography]]==
===[[Specific Process Knowledge/Lithography/Pretreatment|Pretreatment]]===
===[[Specific Process Knowledge/Lithography/Pretreatment|Pretreatment]]===
*[[Specific Process Knowledge/Lithography/Pretreatment#HMDS|HMDS]]
*[[Specific Process Knowledge/Lithography/Pretreatment#HMDS|HMDS]]
Line 209: Line 202:
*[[Specific Process Knowledge/Lithography/UVExposure#Inclined UV lamp|Inclined UV lamp]]
*[[Specific Process Knowledge/Lithography/UVExposure#Inclined UV lamp|Inclined UV lamp]]
| style="width: 40%"|
| style="width: 40%"|


===[[Specific Process Knowledge/Lithography/Baking|Baking]]===
===[[Specific Process Knowledge/Lithography/Baking|Baking]]===
Line 231: Line 225:
*[[Specific Process Knowledge/Lithography/LiftOff#LiftOff(4",6")|Lift-off (4", 6")]]
*[[Specific Process Knowledge/Lithography/LiftOff#LiftOff(4",6")|Lift-off (4", 6")]]


|}
|}<br clear="all" />
| style="width: 50%"|


==[[Specific Process Knowledge/Lithography/DUVStepperLithography|DUV Stepper Lithography]]==
==[[Specific Process Knowledge/Lithography/DUVStepperLithography|DUV Stepper Lithography]]==
Line 254: Line 247:
==[[Specific Process Knowledge/Lithography/3DLithography|3D Lithography]]==
==[[Specific Process Knowledge/Lithography/3DLithography|3D Lithography]]==
*[[Specific Process Knowledge/Lithography/3DLithography#2-Photon Polymerization|2-Photon Polymerization]]
*[[Specific Process Knowledge/Lithography/3DLithography#2-Photon Polymerization|2-Photon Polymerization]]
|}