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|rowspan="5" valign="top"| [[Specific Process Knowledge/Doping|Doping]]
|rowspan="5" valign="top"| [[Specific Process Knowledge/Doping|Doping]]
|Ion implant
|Ion implant
|?
|e.g. P, B, As 
|-
|-
|[[Specific Process Knowledge/Thin film deposition/PECVD| PECVD]]
|[[Specific Process Knowledge/Thin film deposition/PECVD| PECVD]]
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[[Specific Process Knowledge/Lithography/Baking| Lithography/Baking]] <br>
[[Specific Process Knowledge/Lithography/Baking| Lithography/Baking]] <br>
[[Specific Process Knowledge/Lithography/Pretreatment#Oven_250C|Lithography/Pretreatment#Oven_250C]]
|Baking (<300dg)
|Baking (<300dg)
|baking resist and polymers
|baking resist and polymers
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