Specific Process Knowledge: Difference between revisions
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|Pyrolysis | |Pyrolysis | ||
|Resists | |Resists: AZ, SU8, PDMS | ||
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|Rapid Thermal Anneal (RTP) | |Rapid Thermal Anneal (RTP) | ||
| | |SiO2, Si3N4, Ti, III-V | ||
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Bghe (talk | contribs) DCH-Employees-701, NLAB-Employees-701, NLAB-LabmanagerAllUsers, Bureaucrats, Administrators 7,318 edits |
Bghe (talk | contribs) DCH-Employees-701, NLAB-Employees-701, NLAB-LabmanagerAllUsers, Bureaucrats, Administrators 7,318 edits |
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| Line 522: | Line 522: | ||
| | | | ||
|Pyrolysis | |Pyrolysis | ||
|Resists | |Resists: AZ, SU8, PDMS | ||
|- | |- | ||
| | | | ||
|Rapid Thermal Anneal (RTP) | |Rapid Thermal Anneal (RTP) | ||
| | |SiO2, Si3N4, Ti, III-V | ||
|- | |- | ||
| | | | ||