Specific Process Knowledge

2nd Level - Process Topic

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Choose the process topic you are interested in

• Back-end processing

• Characterization

• Doping

• Etch

• Imprinting

• Lithography

• Thermal Process

• Thin film deposition

• Wafer and sample drying

• Wafer Bonding

• Wafer Cleaning

• Wafer Information

• III-V Process

Overview of sample processing 2

File:Cleaning.jpg Clean the sample	File:Drying.jpg Drying Samples	File:Making a layer 1.jpg Film Formation Thermal Oxide growth Thin Film deposition Sputter deposition Thermal deposition E-beam evaporation CVD LPCVD PECVD Coating Spin coating Spray coating Electroplating Epitaxial growth	File:Thermal treatment 1.jpg Thermal treatment of the sample
Make a mask on the sample Lithography Imprinting	Transfer pattern into the sample Wet etch Dry etch Lift-off	Direct structure definition Imprinting LASER machining Lithographic definition Polymer Injection molding	Bonding samples together
Characterize the sample	Back end of the sample Chip/die mounting Wire bonding Dicing

Overview of sample processing 3

File:Clean your sample.png Clean your sample
Entry page in LabAdviser	Techniques	Materials
Wafer cleaning	Soap Sonic	Removes dust and particles
	7-up & Piranha	Removes organics and alkali ions
	RCA	Two step process to remove organics and metals
	5% HF	Removes native oxide
	IMEC	Removing dust, organics and alkali ions and slightly polish the surface. Make the surface hydrophillic

File:Dry your sample.png Dry your sample
Entry page in LabAdviser	Techniques	Materials
Wafer and sample drying	Spin dryers	Whole wafers
	Critial point dryer	Sensitive wafers

File:Create a film on your sample.png Create a layer/film on your sample
Entry page in LabAdviser	Techniques	Materials
Thermal Process/Oxidation	Thermal oxidation	Thermal SiO2
Thin film deposition
	Sputter deposition	Si,SiO2,Si3N3,TiO2, metals
	Thermal evaporation	Al, ?
	E-beam evaporation	Metals
	LPCVD	Si3N4, SRN, SiO2, Si (poly and amorph)
	PECVD	Si3N4, SiO2, PBSG
	Electroplating	Ni
Lithography/Coaters
	Spin coating	resists, polymers
	Spray coating	resists, polymers
Epitaxial growth	MOCVD	?

File:Dope your sample.png Dope your sample
Entry page in LabAdviser	Techniques	Materials
Thin film deposition/PECVD	PECVD	Deposition of SiO2 or Si3N4 doped with P,B and Ge
Thin film deposition/Furnace LPCVD PolySilicon	LPCVD	Deposition of PolySi doped with B or P
Thermal Process/Dope with Boron	Predeposition and drive-in	Doping Silicon wafers with boron
Thermal Process/Dope with Phosphorus	Predeposition and drive-in	Doping Silicon wafers with phosphorus
Ionimplant		?

File:Thermal treat your sample.png Thermal treatment of your sample
Entry page in LabAdviser	Techniques	Materials

File:Make a mask on your sample.png Make a mask on your sample
Entry page in LabAdviser	Techniques
Lithography
	Photolithography
	Deep UV lithography
	E-beam lithography
	Imprinting

File:Transfer mask pattrn to your sample.png Transfer mask pattern to your sample
Entry page in LabAdviser	Techniques	Materials
Etch
	Wet etch	Si,Glass,SiO2,Si3N4,Al,Cr,Ti,Au,Pt,InP,InGaAsP,GaAs/AlGaAs
	Dry etch	Any material
Lift-off		?

File:Transfer mask pattrn to your sample.png Define your structure directly to your sample
Imprinting
LASER machining
Lithographic definition
Polymer Injection molding

File:Bond your samples together.png Bond your samples together
Entry page in LabAdviser	Techniques	Materials

File:Characterize your sample.png Characterize your sample
Entry page in LabAdviser	Techniques	Materials

File:Pack your sample (back-end).png Pack your sample (back-end)
Chip/die mounting
Wire bonding
Dicing