Specific Process Knowledge/Lithography: Difference between revisions
| Line 28: | Line 28: | ||
|Pattern transfer via DeepUltraViolet (DUV) light | |Pattern transfer via DeepUltraViolet (DUV) light | ||
|Pattern transfer via electron beam | |Pattern transfer via electron beam | ||
| | |Pattern transfer via hot embossing(HE) | ||
| | |Pattern transfer via direct writing | ||
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