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Specific Process Knowledge/Lithography: Difference between revisions

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!'''Allowed materials'''
!'''Allowed materials'''
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*Si, SiO2, SOI, quartz, pyrex, III-V materials
*Any standard cleanroom material
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*Si, SiO2, SOI, quartz, pyrex, III-V materials
*Any standard cleanroom material
|
|
*Si, SiO2, SOI, quartz, pyrex, III-V materials
*Any standard cleanroom material
|
|
*Si, SiO2, SOI, quartz, pyrex, III-V materials
*Any standard cleanroom material
|
|
*Si, SiO2, SOI, quartz, pyrex, III-V materials
*Any standard cleanroom material
|-
|-
|}
|}
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