Specific Process Knowledge/Lithography: Difference between revisions
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*Imprint polymers: | *Imprint polymers: | ||
** | **Topas | ||
**PMMA | |||
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*UV cross-linking: | *UV cross-linking: | ||
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*~0.5µm to 20µm | *~0.5µm to 20µm | ||
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*~50nm to 2µm | *~50nm to 2µm | ||
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*~30nm to 0.5 µm | *~30nm to 0.5 µm | ||
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*~ | *~ 100nm to 2µm | ||
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* | *droplet | ||
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