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'''Feedback to this page''': '''[mailto:labadviser@danchip.dtu.dk?Subject=Feed%20back%20from%20page%20http://labadviser.danchip.dtu.dk/index.php?title=Specific_Process_Knowledge/Thin_film_deposition/thermalevaporator click here]'''  
'''Feedback to this page''': '''[mailto:labadviser@nanolab.dtu.dk?Subject=Feed%20back%20from%20page%20http://labadviser.nanolab.dtu.dk/index.php?title=Specific_Process_Knowledge/Thin_film_deposition/thermalevaporator click here]'''  


<i> This page is written by <b>DTU Nanolab staff</b></i>
<i> This page is written by <b>DTU Nanolab staff</b></i>
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*[[Specific Process Knowledge/Thin film deposition/Deposition of Aluminium/Thermal deposition of Al|Aluminium]]
*[[Specific Process Knowledge/Thin film deposition/Deposition of Aluminium/Thermal deposition of Al|Aluminium]]
*[[Specific Process Knowledge/Thin film deposition/Deposition of Silver|Silver]]
*[[Specific Process Knowledge/Thin film deposition/Deposition of Silver/Deposition of Silver in Thermal Evaporator|Silver]]
*[[Specific Process Knowledge/Thin film deposition/Deposition of Chromium/Thermal evaporation of Cr in Thermal evaporator|Chromium]]
*[[Specific Process Knowledge/Thin film deposition/Deposition of Chromium/Thermal evaporation of Cr in Thermal evaporator|Chromium]]
*[[Specific Process Knowledge/Thin film deposition/Deposition of Germanium/Thermal Ge evaporation Thermal Evaporator|Germanium]]
*[[Specific Process Knowledge/Thin film deposition/Deposition of Germanium/Thermal Ge evaporation Thermal Evaporator|Germanium]]
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!style="background:silver; color:black" align="left" valign="top" rowspan="5"|Performance
!style="background:silver; color:black" align="left" valign="top" rowspan="5"|Performance
|style="background:LightGrey; color:black"|Film thickness||style="background:WhiteSmoke; color:black"|
|style="background:LightGrey; color:black"|Film thickness||style="background:WhiteSmoke; color:black"|
*10Å - 1µm (Al and Ag)
*10Å - 1µm (Al)
*up to 100 nm (Cr) (ask if you wish to deposit more)
*10Å - 0.5µm (Ag)
*for other metals ask if in doubt
*up to 100 nm (Cr)
*ask the [mailto:thinfilm@nanolab.dtu.dk Thin Film group] if in doubt or if you wish to exceed the limits
|-
|-
|style="background:LightGrey; color:black"|Deposition rate
|style="background:LightGrey; color:black"|Deposition rate
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