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UV Exposure Comparison Table

	Aligner: MA6-1	Aligner: MA6-2	Aligner: Maskless 01	Aligner: Maskless 02	Aligner: Maskless 03	Aligner: Maskless 04
Purpose	Top side alignment Back side alignment UV exposure NB: this tool is in PolyFabLab	Top side alignment Back side alignment UV exposure Bond alignment	Top side alignment Maskless UV exposure	Top side alignment Back side alignment Maskless UV exposure	Top side alignment Back side alignment Maskless UV exposure	Top side alignment Maskless UV exposure Direct laser writing NB: this tool is in PolyFabLab
Minimum feature size	~1 µm	~1 µm	~1 µm	~1 µm	~1 µm	~1 µm
Alignment accuracy	TSA: ±2 µm BSA: ±5 µm	TSA: ±1 µm BSA: ±2 µm	±2 µm (±1 µm possible)	TSA: ± 0.5 µm BSA: ± 1 µm	TSA: ± 0.5 µm BSA: ± 1 µm	±1 µm
Exposure light source	350 W Hg lamp i-line filter (365nm band pass filter)	500 W Hg-Xe lamp i-line filter (365nm band pass filter)	365 nm LED	375 nm laser diode array	405 nm laser diode array	365 nm LED 405 nm laser diode
Exposure mode	Flood exposure Proximity Contact: Soft contact Hard contact Vacuum contact	Flood exposure Proximity Contact: Soft contact Hard contact Vacuum contact	Projection: Pneumatic auto-focus	Projection: Optical auto-focus Pneumatic auto-focus	Projection: Pneumatic auto-focus	Projection: Optical auto-focus Pneumatic auto-focus Direct laser writing: Optical auto-focus Pneumatic auto-focus
Batch size	1	1	1	1	1	1
Allowed materials	All PolyFabLab materials	All cleanroom materials except copper and steel Dedicated chuck for III-V materials	All cleanroom materials	All cleanroom materials	All cleanroom materials	All PolyFabLab materials

Mask vs Maskless aligners

Comparison study between mask aligners and maskless aligners can be found here.

Decommisioned tools

Inclined UV lamp was decommissioned 2023.

Information about decommissioned tool can be found here.