Specific Process Knowledge/Back-end processing/Laser Micromachining Tool
Feedback to this page: click here
Laser Micromachining Tool 
The Laser Micromachining Tool is a microSTRUCT vario from the company 3D-Micromac AG.
The system is able to produce micro structures in different kinds of materials like metals, ceramics, composite materials, etc.
The machine is located in the basement of building 346 under the cleanroom.
The user manual(s), user APV(s), technical information and contact information can be found in LabManager:
The Laser Micromachining Tool in LabManager
It is equipped with 2 high power lasers:
- a 50W picosecond laser that can emit light at 3 wavelengths: 355nm, 532nm and 1064nm and a
- a 100W nanosecond laser with a wavelength of 1064nm.
It consist of these main parts:
- Upper service way
- Manual front door
- Operating panel
- Machine's feet (adjustable)
- Left service way
- Electrical cabinet
Process information
- Silicon cutting and milling
- Borofloat glass cutting and milling
- Quartz cutting and milling
- Nickel cutting and milling (for Polymer Injection Molder)
- Mask making
Laser Processing details
| Material | Pattern | Optics | Frequency | Intensity | Writing speed | Other | Parameter file |
| Silicon | Red (1064nm/255mm) | 100% | ?? mm/s | silicon cutting.par | |||
| Silicon with SiliconNitride | Red (1064nm/255mm) | 100% | ?? mm/s | silicon-SiN cutting.par | |||
| Borofloat glass | Red (1064nm/255mm) | 100% | ?? mm/s | borofloat cutting.par | |||
| Nickel | Red (1064nm/255mm) | 100% | ?? mm/s | nickel cutting red.par | |||
| Nickel | "wafer" 85mm diameter | Green (532nm/255mm) | 200 kHz | 100% | 300 mm/s | Fixed Burst mode, 3 pulses. Sky writing mode 3. | nickel cutting green parameters |
| Mask making | Blue (355nm/103mm) | 20% | ?? mm/s | mask making.par |
| Material | Optics | Frequency | Intensity | Power measured @10% | Writing speed | Number of burst | Number of Z-offset | Number of iteration | Number of parallel lines | Gap in between line | Parameter file | Comments |
| Silicon | Red (1064nm/255mm) | 200 kHz | 100% | 0,57 W | 50 mm/s | 1 burst | none | 4 it. | 1 | N/A | silicon cutting.par | Easily break silicon in cristal plan. Depth of the groove : 25µm |
| Silicon with SiliconNitride | Red (1064nm/255mm) | 100% | ?? mm/s | silicon cutting.par |
The parameter filename extension is here set to .doc because of MediaWiki restrictions. The 3DMM laser software uses .par as parameter file extension. The file should be a pure text-file with no formatting codes etc.