Specific Process Knowledge/Thermal Process/A3 Phosphor Drive-in furnace: Difference between revisions
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==Overview of the performance of the phosphorus drive-in furnace and some process related parameters== | ==Overview of the performance of the phosphorus drive-in furnace and some process related parameters== | ||
{| border="2" cellspacing="0" cellpadding=" | {| border="2" cellspacing="0" cellpadding="0" | ||
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!style="background:silver; color:black;" align=" | !style="background:silver; color:black;" align="center"|Purpose | ||
|style="background:LightGrey; color:black"|Drive-in of phosphor, oxidation of silicon and annealing of the oxide. | |style="background:LightGrey; color:black"|Drive-in of phosphor, oxidation of silicon and annealing of the oxide. | ||
|style="background:WhiteSmoke; color:black"|Oxidation: | |style="background:WhiteSmoke; color:black"|Oxidation: | ||
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*Wet: with torch (H<sub>2</sub>+O<sub>2</sub>) | *Wet: with torch (H<sub>2</sub>+O<sub>2</sub>) | ||
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!style="background:silver; color:black" align=" | !style="background:silver; color:black" align="center"|Performance | ||
|style="background:LightGrey; color:black"|Film thickness | |style="background:LightGrey; color:black"|Film thickness | ||
|style="background:WhiteSmoke; color:black"| | |style="background:WhiteSmoke; color:black"| | ||
*Dry SiO<sub>2</sub>: | *Dry SiO<sub>2</sub>: 50 Å to ~2000 Å (takes too long to make it thicker) | ||
*Wet SiO<sub>2</sub>: | *Wet SiO<sub>2</sub>: 50 Å to ~3 µm ((takes too long to make it thicker) | ||
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!style="background:silver; color:black" align=" | !style="background:silver; color:black" align="center" valign="center" rowspan="3"|Process parameter range | ||
|style="background:LightGrey; color:black"|Process Temperature | |style="background:LightGrey; color:black"|Process Temperature | ||
|style="background:WhiteSmoke; color:black"| | |style="background:WhiteSmoke; color:black"| | ||
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*O<sub>2</sub>, N<sub>2</sub> and H<sub>2</sub> | *O<sub>2</sub>, N<sub>2</sub> and H<sub>2</sub> | ||
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!style="background:silver; color:black" align=" | !style="background:silver; color:black" align="center" valign="center" rowspan="2"|Substrates | ||
|style="background:LightGrey; color:black"|Batch size | |style="background:LightGrey; color:black"|Batch size | ||
|style="background:WhiteSmoke; color:black"| | |style="background:WhiteSmoke; color:black"| | ||