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Specific Process Knowledge/Lithography/Coaters: Difference between revisions

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Jehem (talk | contribs)
DCH-Employees-701, NLAB-Employees-701, NLAB-LabmanagerAllUsers, danchip
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Jehem (talk | contribs)
DCH-Employees-701, NLAB-Employees-701, NLAB-LabmanagerAllUsers, danchip
2,001 edits
No edit summary
Line 61: Line 61:
**mr-DWL
**mr-DWL
**other resists
**other resists
OBS: this tool is in PolyFabLab
 
NB: this tool is in PolyFabLab
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|
*Spraying imprint resist
*Spraying imprint resist
Line 119: Line 120:
! scope=row| Manual dispense option
! scope=row| Manual dispense option
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* no manual dispense
* No manual dispense
* syringe dispense (60cc) of PGMEA-based resist
* Syringe dispense (60cc) of PGMEA-based resist
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|
* no manual dispense
* No manual dispense
* syringe dispense (60cc) of PGMEA and anisole-based resist
* Syringe dispense (60cc) of PGMEA and anisole-based resist
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|
* no manual dispense
* No manual dispense
* syringe dispense (30cc) of PGMEA and anisole-based resist (2" only)
* Syringe dispense (30cc) of PGMEA and anisole-based resist (2" only)
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| Only manual dispense
* yes
* pneumatic dispense for SU-8 resist and EBR solvent <span style="color:red">OBS: disabled 2024</span>
|colspan="2"| Only manual dispense
|colspan="2"| Only manual dispense
| Only manual dispense
| Only manual dispense
Retrieved from "https://labadviser.nanolab.dtu.dk//index.php?title=Specific_Process_Knowledge/Lithography/Coaters"