LabAdviser/346: Difference between revisions
mNo edit summary |
|||
| Line 49: | Line 49: | ||
!A-1 | !A-1 | ||
|At III-V RIE | |At III-V RIE | ||
| | |452 55804 | ||
|- | |- | ||
| Line 56: | Line 56: | ||
!Ax2 | !Ax2 | ||
|At the Lesker | |At the Lesker | ||
| | |452 55815 | ||
|- | |- | ||
| Line 63: | Line 63: | ||
!A-5 | !A-5 | ||
|In the corner near the furnace/plasma asher | |In the corner near the furnace/plasma asher | ||
| | |452 55803 | ||
|- | |- | ||
|- | |- | ||
| Line 69: | Line 69: | ||
!B-1 | !B-1 | ||
|In the corridor, on the wall | |In the corridor, on the wall | ||
| | |452 55806 | ||
|- | |- | ||
| Line 76: | Line 76: | ||
!C-1 | !C-1 | ||
|In the corridor, on the wall | |In the corridor, on the wall | ||
| | |452 55808 | ||
|- | |- | ||
| Line 83: | Line 83: | ||
!D-1 | !D-1 | ||
|In the gowning area (entrance room) | |In the gowning area (entrance room) | ||
| | |452 55703 | ||
|- | |- | ||
| Line 90: | Line 90: | ||
!D-3 | !D-3 | ||
|At the KOH | |At the KOH | ||
| | |452 55940 | ||
|- | |- | ||
| Line 97: | Line 97: | ||
!E-1 | !E-1 | ||
|By the e-beam computers | |By the e-beam computers | ||
| | |452 55943 | ||
|- | |- | ||
| Line 104: | Line 104: | ||
!E-5/E-4 | !E-5/E-4 | ||
|By the MLAs in E-5, by mask aligner in E-4 | |By the MLAs in E-5, by mask aligner in E-4 | ||
| | |452 55946 | ||
|- | |- | ||
| Line 111: | Line 111: | ||
!E-6 | !E-6 | ||
|Furnace 6" | |Furnace 6" | ||
| | |452 55948 | ||
|- | |- | ||
|- | |- | ||
| Line 117: | Line 117: | ||
!F-1 | !F-1 | ||
|III-V growth | |III-V growth | ||
| | |452 55949 | ||
|- | |- | ||
| Line 124: | Line 124: | ||
!F-2 | !F-2 | ||
|To the right of the XRD and Ellipsometer | |To the right of the XRD and Ellipsometer | ||
| | |452 55941 | ||
|- | |- | ||
|- | |- | ||
| Line 130: | Line 130: | ||
!F-3 | !F-3 | ||
|DUV Stepper | |DUV Stepper | ||
| | |452 55947 | ||
|- | |- | ||
| Line 137: | Line 137: | ||
!Basement 901 | !Basement 901 | ||
|Hot Embosser, XRD RotAnode, Laser Micromachining Tool | |Hot Embosser, XRD RotAnode, Laser Micromachining Tool | ||
| | |452 55812 | ||
|- | |- | ||
|-style="background:WhiteSmoke; color:black" | |-style="background:WhiteSmoke; color:black" | ||
!Basement 904 | !Basement 904 | ||
|To the right of the AFM | |To the right of the AFM | ||
| | |452 55813 | ||
|- | |- | ||
|} | |} | ||
Revision as of 08:18, 7 October 2025
DTU Nanolab - Building 346/347
DTU Nanolab has several locations on the Lyngby campus, building 346/347 and 314/307.
Buildings 346 and 347 (formerly know as DTU Danchip) hosts the cleanroom and related offices, as well as the PolyFabLab and SupportLab (photo).
Buildings 314 and 307 (formerly know as DTU CEN) hosts most of the electron microscopes (SEMs and TEMs), and related offices together with some labs, and preparation equipment. More information about our electron microscopy characterization cababilities can be found here.
Building 346:
- Ground Floor: Cleanroom
- First Floor: Several spedcial Labs (e.g. Wet Chemistry Lab, Phoenix Lab) and Fabrication and Characterization equipment (e.g. Dicing Tools, SEM TableTop)
- Basement: Fabrication and Characterization equipment (e.g. Hot Embosser, Laser Micromachining Tool, XRD Anode, AFM, XPS, SEM1)
Building 347:
- Ground Floor: DTU Nanolab Administration, PolyFabLab, SupportLab (previously PackLab), PDMS Lab
- First Floor: Offices, Lunch Room
- Basement: Several spedcial Labs (e.g. Optics Lab, Plasma Lab, Physics Lab)
Please note, due to reconstruction, upgrades, purchases, decommision of equipment or for other reasons, equipment may be moved from the location specified below. Please have a look at www.labmanager.dk under "Basic Info" and "Location" for an updated location.
Cleanroom (Ground Floor in B346) - Layout and Phones
|
| |||||||||||||||||||||||||||||||||||||||||||||||||||
Basement Labs (Basement in B346) - Layout and Phones
PolyFabLab and SupportLab (Ground Floor in B347) - Layout and Phones
