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Specific Process Knowledge/Lithography/UVExposure: Difference between revisions

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DCH-Employees-701, NLAB-Employees-701, NLAB-LabmanagerAllUsers, danchip
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Jehem (talk | contribs)
DCH-Employees-701, NLAB-Employees-701, NLAB-LabmanagerAllUsers, danchip
1,871 edits
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{| {{table}}
{| {{table}}
| align="center" |  
| align="center" |  
{| border="1" cellspacing="1" cellpadding="2"  align="center" style="width:300px"
{| border="1" cellspacing="1" cellpadding="2"  align="center"


! QC Recipe:
! QC:
! Dose and defocus test on 1.5µm AZ5214E
! Dose and defocus test on 1.5µm AZ5214E
! QC limits
|-  
|-  
|Dose test
|Dose test
|
|
Step size is 5 mJ/cm<sup>2</sup>
Step size is 5 mJ/cm<sup>2</sup><br>
Test range is last QC value ± 10 mJ/cm<sup>2</sup> (5 steps total)
Test range is last QC value ± 10 mJ/cm<sup>2</sup> (5 steps total)
|-  
|none
|-
|Defoc test
|Defoc test
|
|
Step size is 1 defoc
Step size is 1 defoc<br>
Test range is last QC value ± 4 (5 steps total)
Test range is last QC value ± 4 (5 steps total)
|-
|}
| align="center" valign="top"|
{| border="2" cellspacing="1" cellpadding="2" align="center" style="width:400px"
!QC limits
!Aligner: Maskless 01 (MLA1)
|-
|Dose
|none
|-
|Defoc
|none
|none
|-
|-
|}
|-
|}
Dose and defoc values are reported in the QC data sheet.
|}
|}
<br/>
<br/>
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