Specific Process Knowledge/Lithography/Coaters/Spin Coater: RCD8 processing: Difference between revisions

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 Resist dispense on the Spin Coater: RCD8 can only be done manually, as the motorized media arm was decommissioned in 2024. Manual dispense is done by administering the resist directly onto the substrate, after it has been loaded into the machine but before the recipe has been started. In most cases, it is done by pushing the resist out of a prefilled syringe. Thin resists can be dispensed by pouring the resist directly from a bottle, but that is more difficult to control.
-The volume dispensed from a syringe may be estimated by measuring the distance the resist level is displaced during a dispense, and calculating the corresponding volume using the diameter of the syringe (23 mm). A displacement of 10 mm corresponds to a dispensed volume of 4 ml. This calculation can also be used to mark the syringe with appropriately spaced guide lines in order to dispense a specific volume.
+The volume dispensed from a syringe may be estimated by measuring the distance the resist level is displaced during a dispense, and calculating the corresponding volume using the diameter of the syringe (23 mm). A displacement of 10 mm corresponds to a dispensed volume of 4 ml. This calculation can also be used to mark the syringe with appropriately spaced guide lines in order to dispense a specific volume. 4-5 ml is an appropriate volume for a 100 mm wafer.
 ==Tips and tricks for dispensing thick resist==