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Specific Process Knowledge/Lithography/UVExposure: Difference between revisions

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DCH-Employees-701, NLAB-Employees-701, NLAB-LabmanagerAllUsers, NLAB-Nlab307-labadviser-users-34891
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Taran (talk | contribs)
DCH-Employees-701, NLAB-Employees-701, NLAB-LabmanagerAllUsers, NLAB-Nlab307-labadviser-users-34891
3,526 edits
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|Dose test
|Dose test
|Last QC value ± 20 mJ/cm2 (9 steps total)
|Last QC value ± 20 mJ/cm<sup>2</sup> (9 steps total)
|-  
|-  
|Defoc test
|Defoc test
|Last QC value ± 8 mJ/cm2 (9 steps total)
|Last QC value ± 8 (9 steps total)
|-
|-
|}
|}
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