Specific Process Knowledge/Lithography/UVExposure: Difference between revisions
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Dose and defoc values are reported in the QC data sheet. | Dose and defoc values are reported in the QC data sheet. | ||
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{| border="1" cellspacing="2" cellpadding="2" colspan="3" | {| border="1" cellspacing="2" cellpadding="2" colspan="3" | ||
|bgcolor="#98FB98" |'''Quality Control (QC) for Aligner: Maskless 02 (MLA2) - Alignment''' | |bgcolor="#98FB98" |'''Quality Control (QC) for Aligner: Maskless 02 (MLA2) - Alignment''' | ||
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{| border="2" cellspacing="1" cellpadding="2" align="center" style="width:400px" | {| border="2" cellspacing="1" cellpadding="2" align="center" style="width:400px" | ||
!QC limits | !QC limits | ||
!Aligner: Maskless | !Aligner: Maskless 02 (MLA2) | ||
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|Topside alignment error | |Topside alignment error | ||
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Camera offsets will be adjusted if alignment error is outside the limit. | Camera offsets will be adjusted if alignment error is outside the limit. | ||
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=== Equipment performance and process related parameters === | === Equipment performance and process related parameters === | ||