Specific Process Knowledge/Lithography/Development: Difference between revisions
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==Manual beaker development in fumehood== | ==Manual beaker development in fumehood== | ||
Beaker development is a fall-back option if you have a process, which is not compatible with the automatic, or semi-automatic, tools. We always recommend using, or at least trying, the automatic and semi-automatic tools, instead of using manual beaker development. | Beaker development, in fume hood 09: UV development or fume hood 10: e-beam development, is a fall-back option if you have a process, which is not compatible with the automatic, or semi-automatic, tools. We always recommend using, or at least trying, the automatic and semi-automatic tools, instead of using manual beaker development. | ||
Manual beaker development is necessary for some processes, but should be avoided if possible, due to the fact that it is notoriously difficult to get a stable repeatable process - especially when multiple users are sharing the same process; everybody simply does things a bit different from each other, which leads to changes in the process outcome. Some processes have a very narrow process window, which makes them inherently sensitive to small changes in the development. The manual development also has a much greater chance of producing particles, both from the operator and the environment. | Manual beaker development is necessary for some processes, but should be avoided if possible, due to the fact that it is notoriously difficult to get a stable repeatable process - especially when multiple users are sharing the same process; everybody simply does things a bit different from each other, which leads to changes in the process outcome. Some processes have a very narrow process window, which makes them inherently sensitive to small changes in the development. The manual development also has a much greater chance of producing particles, both from the operator and the environment. | ||
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===Standard manual beaker development procedure=== | ===Standard manual beaker development procedure=== | ||
[[File:Beaker_development_v1.png|600px|thumb|Standard procedure for manual beaker development in fume hood:<br>1) Submerge exposed substrate into development solution<br>2) When timer ends, move substrate directly into Rinse 1<br>3) After a few seconds, move substrate into Rinse 2*<br>4) Remove developed substrate for drying<br>*It is allowed to omit the Rinse 2 step|right]] | [[File:Beaker_development_v1.png|600px|thumb|Standard procedure for manual beaker development in fume hood:<br>1) Submerge exposed substrate into development solution<br>2) When timer ends, move substrate directly into Rinse 1<br>3) After a few seconds, move substrate into Rinse 2*<br>4) Remove developed substrate for drying<br>(*It is allowed to omit the Rinse 2 step)|right]] | ||
The standard procedure for manual beaker development in a fume hood is as follows: | The standard procedure for manual beaker development in a fume hood is as follows: | ||
#Prepare development process | #Prepare development process | ||
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#The developed substrate can now be removed and dried | #The developed substrate can now be removed and dried | ||
<nowiki>*</nowiki>It is allowed to omit the Rinse 2 step | (<nowiki>*</nowiki>It is allowed to omit the Rinse 2 step) | ||
'''Clean up''' | '''Clean up''' | ||