Specific Process Knowledge/Lithography/LiftOff: Difference between revisions
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'''Problem:''' Mathias experienced the delamination of TiAu after the lift-off process, see the image. | '''Problem:''' Mathias experienced the delamination of TiAu after the lift-off process, see the image. | ||
'''Solution:''' Adding a descum step (70 ml/min O2, 70 ml/min N2, 150W, 5 min) right before metal depositions. | '''Solution:''' Adding a descum step (70 ml/min O2, 70 ml/min N2, 150W, 5 min (Plasma Asher 1)) right before metal depositions. | ||
[[File:Delamination of TiAu.jpg|thumb]] | [[File:Delamination of TiAu.jpg|thumb]] | ||