Specific Process Knowledge/Thin film deposition/Furnace LPCVD TEOS: Difference between revisions
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[[Category: Furnaces|LPCVD TEOS]] | [[Category: Furnaces|LPCVD TEOS]] | ||
==LPCVD TEOS | ==B3 LPCVD TEOS furnace== | ||
[[Image:160904_danchip_4538.jpg|300x300px|thumb|B3 LPCVD TEOS furnace. Positioned in cleanroom B-1]] | [[Image:160904_danchip_4538.jpg|300x300px|thumb|B3 LPCVD TEOS furnace. Positioned in cleanroom B-1]] | ||