Specific Process Knowledge/Thin film deposition/Furnace LPCVD TEOS: Difference between revisions
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[[media:Furnace_computer_manual.pdf|Manual for furnace computers for the A, B, C and E stack furnaces]] | [[media:Furnace_computer_manual.pdf|Manual for furnace computers for the A, B, C and E stack furnaces]] | ||
*[https://labmanager.dtu.dk/view_binary.php?class=MiscDocument&id=19&name=Furnace+computer+manual+April+2024.pdf See LabManager (requires a login)] | |||
==Process Knowledge== | ==Process Knowledge== | ||