Specific Process Knowledge/Lithography/EBeamLithography/EBLsubstratePrep: Difference between revisions
| Line 84: | Line 84: | ||
|} | |} | ||
Resist thickness as function of spin speed on Lab Spin 2/3 can be estimated from the parameters above as y = ax<sup>b</sup>, where y is resist thickness in nm and x is spin speed in RPM. | Resist thickness as function of spin speed on Lab Spin 2/3 can be estimated from the parameters above as y = ax<sup>b</sup>+c, where y is resist thickness in nm and x is spin speed in RPM. | ||
==User supplied resists== | ==User supplied resists== | ||