Specific Process Knowledge/Lithography/PMMA

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Resist	Polarity	Manufacturer	Comments	Technical reports	Spinner	Thinner	Developer	Rinse	Remover	Process flows (in docx-format)
PMMA	Positive	AllResist	We have various types of PMMA in the cleanroom. Please contact Lithography for information.	MSDS PMMA, Processing guidelines	See table here	Anisole	IPA:H2O (7:3), MIBK:IPA (1:3)	IPA	acetone/1165

Spin Curves

The thickness is measured on VASE Ellipsometer using a simple Cauchy model for a transparent polymer on Si. The measurements are performed at one incidence angle (70 degrees) only. 9 points on each 4" wafer has been measured; the standard deviation thus representing the homogeinity of the film on the 4" wafers. Please notice, that the spinning curves were made in 2015.

AllResist AR-P 672.03 (PMMA) (~ 2ml per 4" wafer) spin coated on 'Spin Coater: Manual Standard Resists, E-5, WILTID & TIGRE, 26-10-2015. Softbake 3 min @ 150 degC.
Spin Speed [rpm]	Acceleration [rpm/s]	Thickness [nm]	St Dev
4000	2000	95.55	0.55
5000	2000	85.50	0.92
7000	2000	72.79	1.18

AllResist AR-P 672.03 (PMMA) diluted 1:1 in Anisole (~ 2ml per 4" wafer) spin coated on 'Spin Coater: Manual Standard Resists, E-5, WILTID & TIGRE, 26-10-2015. Softbake 3 min @ 150 degC.
Spin Speed [rpm]	Acceleration [rpm/s]	Thickness [nm]	St Dev
2000	2000	51.37	0.25
3000	2000	41.97	0.24
4000	2000	36.25	0.25
5000	2000	32.42	0.30
6000	2000	30.17	0.29
7000	2000	28.76	0.43