Specific Process Knowledge/Thin film deposition/Deposition of Silicon Oxide: Difference between revisions
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*Not yet known, but expect lower density than bulk material. | |||
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*Many smaller pieces or | *Many smaller pieces or | ||
*up to 10x 4" or 6" wafer | *up to 10x 4" or 6" wafer | ||
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*Up to 4 x 6" wafer or | |||
*3x 8" wafers (ask for special holder) | |||
*Many smaller pieces | |||
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*Beaker depended | *Beaker depended | ||
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*Almost any that will not degas and is not very poisonous | *Almost any that will not degas and is not very poisonous | ||
*See [http://labmanager.dtu.dk/function.php?module=XcMachineaction&view=edit&MachID=441 cross-contamination sheet] | *See [http://labmanager.dtu.dk/function.php?module=XcMachineaction&view=edit&MachID=441 cross-contamination sheet] | ||
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*Almost any that will not degas and is not very poisonous | |||
*See [http://labmanager.dtu.dk/function.php?module=XcMachineaction&view=edit&MachID=511 cross-contamination sheet] | |||
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*Acids react with a number of metals to produce hydrogen which, in contact with the air, may cause explosions | *Acids react with a number of metals to produce hydrogen which, in contact with the air, may cause explosions | ||