Specific Process Knowledge/Lithography/UVExposure: Difference between revisions
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!style="background:silver; color:black;" align="center" width="60"|Purpose | !style="background:silver; color:black;" align="center" width="60"|Purpose | ||
|style="background:LightGrey; color:black"| | |style="background:LightGrey; color:black"| | ||
|style="background:WhiteSmoke; color:black | |style="background:WhiteSmoke; color:black" colspan="2"| | ||
Mask alignment and UV exposure, potentially DUV exposure <sup>1)</sup> | Mask alignment and UV exposure, potentially DUV exposure <sup>1)</sup> | ||
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|style="background:LightGrey; color:black"|Exposure mode | |style="background:LightGrey; color:black"|Exposure mode | ||
|style="background:WhiteSmoke; color:black | |style="background:WhiteSmoke; color:black" colspan="2"| | ||
vacuum contact, hard contact, soft contact, proximity, flood exposure | vacuum contact, hard contact, soft contact, proximity, flood exposure | ||
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| style="background:LightGrey; color:black"|Exposure light/filters | | style="background:LightGrey; color:black"|Exposure light/filters | ||
|style="background:WhiteSmoke; color:black | |style="background:WhiteSmoke; color:black" colspan="2"| | ||
*broadband (i-, g-, h-line) | *broadband (i-, g-, h-line) | ||
*365 nm (i-line) | *365 nm (i-line) | ||
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|style="background:LightGrey; color:black"|Minimum structure size | |style="background:LightGrey; color:black"|Minimum structure size | ||
|style="background:WhiteSmoke; color:black | |style="background:WhiteSmoke; color:black" colspan="2"| | ||
Typically 1.25 µm, possibly down to 0.8 µm <sup>1)</sup> | Typically 1.25 µm, possibly down to 0.8 µm <sup>1)</sup> | ||
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|style="background:LightGrey; color:black"|Mask size | |style="background:LightGrey; color:black"|Mask size | ||
|style="background:WhiteSmoke; color:black | |style="background:WhiteSmoke; color:black" colspan="2"| | ||
*5x5 inch | *5x5 inch | ||
*7x7 inch | *7x7 inch | ||
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|style="background:LightGrey; color:black"|Alignment modes | |style="background:LightGrey; color:black"|Alignment modes | ||
|style="background:WhiteSmoke; color:black | |style="background:WhiteSmoke; color:black" colspan="2"| | ||
*Top side (TSA) | *Top side (TSA) | ||
*Backside (BSA) | *Backside (BSA) | ||
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!style="background:silver; color:black" align="center" valign="center" rowspan="3"|Substrates | !style="background:silver; color:black" align="center" valign="center" rowspan="3"|Substrates | ||
|style="background:LightGrey; color:black"|Substrate size | |style="background:LightGrey; color:black"|Substrate size | ||
|style="background:WhiteSmoke; color:black | |style="background:WhiteSmoke; color:black" colspan="2"| | ||
* small pieces 1x1cm | * small pieces 1x1cm | ||
* 50 mm wafers | * 50 mm wafers | ||
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| style="background:LightGrey; color:black"|Allowed materials | | style="background:LightGrey; color:black"|Allowed materials | ||
|style="background:WhiteSmoke; color:black | |style="background:WhiteSmoke; color:black" colspan="2"| | ||
All cleanroom materials except copper and steel | All cleanroom materials except copper and steel | ||
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|style="background:LightGrey; color:black"|Batch | |style="background:LightGrey; color:black"|Batch | ||
|style="background:WhiteSmoke; color:black | |style="background:WhiteSmoke; color:black" colspan="2"| | ||
1 | 1 | ||
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