Specific Process Knowledge/Lithography/Development: Difference between revisions
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{| border="2" cellspacing="0" cellpadding="2" | {| border="2" cellspacing="0" cellpadding="2" | ||
!style="background:silver; color:black; | !style="background:silver; color:black;" width="60"|Purpose | ||
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Development of | Development of | ||
*AZ nLOF | *AZ nLOF | ||
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*DUV resists | *DUV resists | ||
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!style="background:silver; color:black; | !style="background:silver; color:black;" width="60"|Developer | ||
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AZ 726 MIF | AZ 726 MIF | ||
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!style="background:silver; color:black" align="center" valign="center" rowspan="2"|Method | !style="background:silver; color:black" align="center" valign="center" rowspan="2"|Method | ||
|style="background:LightGrey; color:black"|Development | |style="background:LightGrey; color:black"|Development | ||
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Puddle | Puddle | ||
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|style="background:LightGrey; color:black"|Handling | |style="background:LightGrey; color:black"|Handling | ||
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Vacuum chuck | Vacuum chuck | ||
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!style="background:silver; color:black" align="center" valign="center" rowspan="3"|Process parameters | !style="background:silver; color:black" align="center" valign="center" rowspan="3"|Process parameters | ||
|style="background:LightGrey; color:black"|Temperature | |style="background:LightGrey; color:black"|Temperature | ||
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Room temperature | Room temperature | ||
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|style="background:LightGrey; color:black"|Agitation | |style="background:LightGrey; color:black"|Agitation | ||
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Rotation | Rotation | ||
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|style="background:LightGrey; color:black"|Rinse | |style="background:LightGrey; color:black"|Rinse | ||
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DI water | DI water | ||
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!style="background:silver; color:black" align="center" valign="center" rowspan="3"|Substrates | !style="background:silver; color:black" align="center" valign="center" rowspan="3"|Substrates | ||
|style="background:LightGrey; color:black"|Substrate size | |style="background:LightGrey; color:black"|Substrate size | ||
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* 100 mm wafers | * 100 mm wafers | ||
* 150 mm wafers | * 150 mm wafers | ||
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| style="background:LightGrey; color:black"|Allowed materials | | style="background:LightGrey; color:black"|Allowed materials | ||
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Silicon and glass substrates | Silicon and glass substrates | ||
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|style="background:LightGrey; color:black"|Batch | |style="background:LightGrey; color:black"|Batch | ||
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1-25 | 1-25 | ||
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