Specific Process Knowledge/Lithography/UVExposure: Difference between revisions
| Line 668: | Line 668: | ||
'''[https://www.youtube.com/playlist?list=PLjWVU97LayHAiCabstMfAUeeWyQoQI_cV Training videos]''' | '''[https://www.youtube.com/playlist?list=PLjWVU97LayHAiCabstMfAUeeWyQoQI_cV Training videos]''' | ||
Equipment info in [http://labmanager.dtu.dk/function.php?module=Machine&view=view&mach=464 LabManager] | Equipment info in [http://labmanager.dtu.dk/function.php?module=Machine&view=view&mach=464 LabManager] - '''requires login''' | ||
===Exposure dose and defocus=== | ===Exposure dose and defocus=== | ||