Specific Process Knowledge/Lithography/SU-8: Difference between revisions
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** 120 nm film: dilute 25 ml SU-8 2002 in 80 ml cyclopentanone, spin at 7000 rpm | ** 120 nm film: dilute 25 ml SU-8 2002 in 80 ml cyclopentanone, spin at 7000 rpm | ||
** 60-80 nm film: dilute 5 ml SU-8 2002 in 32 ml cyclopentanone, spin at 2000 - 7000 rpm | ** 60-80 nm film: dilute 5 ml SU-8 2002 in 32 ml cyclopentanone, spin at 2000 - 7000 rpm | ||
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==Baking== | ==Baking== | ||