Specific Process Knowledge/Lithography/UVExposure: Difference between revisions
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===Process information=== | ===Process information=== | ||
The KS Aligner has an i-line notch filter installed. This results in an exposure light peak around 365nm with a FWHM of 7nm. | The KS Aligner has an i-line notch filter installed. This results in an exposure light peak around 365nm with a FWHM of 7nm. | ||
*[[Specific Process Knowledge/Lithography/Resist#KS_Aligner|Information on UV exposure dose]] | |||
===Quality Control (QC)=== | ===Quality Control (QC)=== | ||