Specific Process Knowledge/Etch/DRIE-Pegasus/Pegasus-2: Difference between revisions
| Line 33: | Line 33: | ||
{{Template:Peg2configheader1 | {{Template:Peg2configheader1 | ||
|TableHeader= Currently valid from | |TableHeader= Currently valid from May 25 2022 onwards | ||
}} | }} | ||
{{Template:Peg2configcontent1 | {{Template:Peg2configcontent1 | ||
| Line 110: | Line 110: | ||
|} | |} | ||
== Process information == | == Process information == | ||