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DCH-Employees-701, NLAB-Employees-701, NLAB-LabmanagerAllUsers, NLAB-Nlab347-labadviser-users-35231
1,736 edits
→Stylus Profiler (Tencor P17): added Acceptance test results
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==Stylus Profiler (Tencor P17) ==
==Stylus Profiler (Tencor P17) ==


The P17 Stylus Profiler from KLA Tencor is used in a similar manner to the Dektak XTA for profiling surfaces with structures in the micro- and submicrometer range as well as stress mapping and roughness measurements. It has more advanced options for [[Specific_Process_Knowledge/Characterization/Stress_measurement|stress measurements]] than the Dektak XTA and allows the user to measure a stress map with down to 5° radial resolution.  
The P17 Stylus Profiler from KLA Tencor is used in a similar manner to the Dektak XTA for profiling surfaces with structures in the micro- and submicrometer range as well as stress and roughness measurements and 3D maps made up of many parallel lines.  


A line profile may be done across a specific structure located with a camera. It is also possible to measure many parallel scans to map out a surface, or to program a sequence of scans in different locations on a wafer defined with respect to some deskew points. Programming a sequence is somewhat easier and the manual for doing it much better for the P17 than for the Dektak XTA.
Compared to the DektakXT, the P17 has more advanced options for [[Specific_Process_Knowledge/Characterization/Stress_measurement|stress measurements]] and allows the user to measure a stress map with down to 5° radial resolution. Programming a sequence of predefined scans is also somewhat easier and the manual for doing it much better for the P17 than for the Dektak XTA. A disadvantage of the P17 is that is can be hard to locate the structures one wants to measure as the maximum field of view of the camera is 1x1.5 mm. We recommend knowing your sample well or having a picture of the sample design available so you can easily locate the features of interest. Otherwise the P17 is easy to use, fast and accurate, just like the DektakXT.
 
A disadvantage of the P17 is that is can be hard to locate the structures one wants to measure as the maximum field of view of the camera is 1x1.5 mm. We recommend knowing your sample well or having a picture of the sample design available so you can easily locate the features of interest. Otherwise the P17 is easy to use, fast and accurate, just like the DektakXT.


'''The user manual, quality control procedure and results, technical information and contact information can be found in LabManager:'''  
'''The user manual, quality control procedure and results, technical information and contact information can be found in LabManager:'''  
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'''Info about using the analysis software from outside the cleanroom:'''  
'''Info about using the analysis software from outside the cleanroom:'''  
[[Specific_Process_Knowledge/Characterization/Profiler/Apex software|Apex software access]]
[[Specific_Process_Knowledge/Characterization/Profiler/Apex software|Apex software access]]
'''Acceptance test'''
*Acceptance measurements on the P17: [[Media:Appendix 3 Acceptance test p17 final_v2_Completed.pdf]]


===Equipment performance and process related parameters===
===Equipment performance and process related parameters===
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