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Specific Process Knowledge/Lithography/Descum: Difference between revisions

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DCH-Employees-701, NLAB-Employees-701, NLAB-LabmanagerAllUsers
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Kabi (talk | contribs)
DCH-Employees-701, NLAB-Employees-701, NLAB-LabmanagerAllUsers
1,146 edits
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Recipe settings:
Recipe settings:
Kept oxygen and pressure settings constant at Oxydgen: 5 sccm under process; Pressure: 0,2mbar and vary power.
Kept oxygen and pressure settings constant at Oxygen: 5 sccm under process; Pressure: 0,2mbar and vary power.


Experiment parameters:
Experiment parameters:
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