Specific Process Knowledge/Lithography/SU-8: Difference between revisions
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In the cleanroom the SU-8 2000 product line is widely used, where the '''SU-8 2005''' and '''SU-8 2075''' are supplied by Nanolab. Other resit formulation can be used but has to be ordered by the user him/herself. | In the cleanroom the SU-8 2000 product line is widely used, where the '''SU-8 2005''', '''SU-8 2035''', and '''SU-8 2075''' are supplied by Nanolab. Other resit formulation can be used but has to be ordered by the user him/herself. | ||
Process recommendations: | Process recommendations: | ||