Specific Process Knowledge/Lithography/Descum: Difference between revisions

@@ Line 73: / Line 73: @@
 |'''Ashing time (min)'''|| 1|| 2 || 3 || 5 || 7
 |-
-|'''Etched Thickness (nm)'''|| 6,28 || 102,99 || 76,92 || N/A || N/A
+|'''Etched Thickness (nm)'''|| 268,88 || 199,54 || 219,03 || 200,86 || 292,15
 |-
 |}