DTU Nanolab offers a Tool Package Training in Lithography; the course includes theory on lithographic processes and equipment, as well as training in equipment operation and processing in the cleanroom.
The course is for all users that intend to perform any kind of lithographic processing in the cleanroom, and is a prerequisite for training in other lithography equipment.
For details, dates, and course material, please check the course description under Courses.
Lithography Tool Package Training
Schedule
Theoretical part
Lecture videos that can be viewed at one's leisure.
A 1 hour "questions and exercises" session 2 times a month (typically Fridays 09:30-10:30).
Practical part
A 3-4 hour training session 2 times a month, max. 4 persons per session (typically Wednesdays 09:00 - 12:30 or 10:00 - 13:30).
This part is not mandatory, and may be replaced by individual trainings if relevant.
Location
Theoretical part
The location of the "questions and exercises" session is room 121A in building 345C.
Practical part
The training session takes place inside the cleanroom. The meeting point will be in front of the first equipment.
Qualified Prerequisites
Cleanroom safety course at DTU Nanolab
Admission to the cleanroom must be obtained before the training session
Theoretical part must be completed before the training session
Preparations
Before the "questions and exercises" session
Read Sami Franssila "Introduction to Microfabrication" (2010), Chapter 9: Optical Lithography. (Available online from DTU campus)
Watch the lecture videos (7 videos, 2:41 hours in total). Write down any questions that may arise during the videos.
Before training session
Complete the theoretical part (Q&E)
Watch the training videos of spin coating (automatic), exposure (operation, and alignment), and development (automatic).
Study the equipment manuals. The manuals are available in LabManager.
Study the TPT process flows (first print, and alignment).
