Specific Process Knowledge/Characterization/Profiler: Difference between revisions
| Line 200: | Line 200: | ||
===Process Information=== | ===Process Information=== | ||
*[[Media:Plu neox 2010.pdf| Sensofar presentation on how the sensofar works (for the previous system but the techniques are the same)]] | *[[Media:Plu neox 2010.pdf| Sensofar presentation on how the sensofar works (for the previous system but the techniques are the same)]] | ||
*[[Media:BR90-05F-EN-Brochure-S-neox.pdf|S Neox leaflet including specifications]] | *[[Media:BR90-05F-EN-Brochure-S-neox.pdf|S Neox leaflet including specifications]] | ||
*[[/Optical Profiler (Sensofar) acceptance test|Results from the Optical Profiler (Sensofar) acceptance test - for the previous system - expired!!]] | |||
*Acceptance measurements on the S Neox Sensofar: [[Media:Acceptance measurements on Nanolab samples.xlsx.pdf]] | |||
===Equipment performance and process related parameters=== | ===Equipment performance and process related parameters=== | ||