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Specific Process Knowledge/Lithography/SU-8: Difference between revisions

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SU-8 is an epoxy based negative i-line photoresist  with a high contrast. More then 10:1 aspect ratio imaging with vertical sidewalls is one of the widely used properties of this resist. It also has high chemical, plasma and temperature resistance after curing which makes it well suited for permanent use applications.
SU-8 is an epoxy based negative i-line photoresist  with a high contrast. More then 10:1 aspect ratio imaging with vertical sidewalls is one of the widely used properties of this resist. It also has high chemical, plasma and temperature resistance after curing which makes it well suited for permanent use applications.


'''''Note:''' Since the SU-8 is epoxy-based the user is required to take the mandatory epoxy course "Personlig sikkerhed ved arbejde med epoxy". Registration to this course can be found on Portalen under: [http://portalen.dtu.dk/DTU_Generelt/AHR/Ansat/Kompetenceudvikling/Kurser/Arbejdsmiljoe.aspx Arbejdsmiljø kurser]
'''''Note:''' Since the SU-8 is epoxy-based the user is required to take the mandatory epoxy course "Personlig sikkerhed ved arbejde med epoxy". Registration to this course can be found on Portalen under: [https://www.inside.dtu.dk/en/medarbejder/hr-og-arbejdsmiljoe/kompetenceudvikling/kursusoversigt_overside/kursusoversigt/arbejdsmiljoe-og-beredskabskurser/epoxy-kursus?fs=1 Arbejdsmiljø kurser]
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