Specific Process Knowledge/Characterization/Profiler: Difference between revisions
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If the scan speed is too low and you are measuring a small step <500 nm, you may experience drift in the measurement. Of course you also must make sure the feature you are measuring is wide enough for the stylus tip to reach the bottom (see the [http://labmanager.dtu.dk/d4Show.php?id=2346&mach=304 DektakXT manual], Figure 3 for details). | If the scan speed is too low and you are measuring a small step <500 nm, you may experience drift in the measurement. Of course you also must make sure the feature you are measuring is wide enough for the stylus tip to reach the bottom (see the [http://labmanager.dtu.dk/d4Show.php?id=2346&mach=304 DektakXT manual], Figure 3 for details). | ||
If the step is gradual or the surface is very rough, | A sharp vertical step is easiest to measure. If the step is gradual or the surface is very rough, it can be difficult to determine where to measure and how the scan should be leveled. | ||
====Influence of calibration standard uncertainty==== | ====Influence of calibration standard uncertainty==== | ||