Specific Process Knowledge/Lithography/EBeamLithography: Difference between revisions
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* Let the bottle dry in the fumehood. | * Let the bottle dry in the fumehood. | ||
* Bring the (main) bottle of resist to the fumehood. Carefully unscrew the lid of the resist bottle. '''If necessary, wipe the thread of the resist bottle before you pour resist into your own bottle'''; dried resists may sit on the thread and be transferred into your bottle (or worse into the large resist bottle) when pouring. | * Bring the (main) bottle of resist to the fumehood. Carefully unscrew the lid of the resist bottle. '''If necessary, wipe the thread of the resist bottle before you pour resist into your own bottle'''; dried resists may sit on the thread and be transferred into your bottle (or worse into the large resist bottle) when pouring. | ||
* Clean all bottles on the outside with | * Clean all bottles on the outside with acetone or IPA, let them fume off in the fumehood. Clean the measurement beaker as well. | ||
* Find a label to your resist bottle; bottles without labels will be removed from the cleanroom. | * Find a label to your resist bottle; bottles without labels will be removed from the cleanroom. | ||
* Write name, Lotnumber, group and date on your bottle. | * Write name, Lotnumber, group and date on your bottle. | ||