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Specific Process Knowledge/Etch/III-V ICP/InP-InGaAsP-InGaAs: Difference between revisions

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== InP etch with Cl2/H2 and a Si carrier wafer (2019)  [[Image:section under construction.jpg|70px]] ==
== InP etch with Cl2/H2 and a Si carrier wafer (2019)  ==
''Work done by Berit Herstrøm @Nanolab spring 2019''
''Work done by Berit Herstrøm @Nanolab spring 2019''
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