Specific Process Knowledge/Etch/III-V ICP/InP-InGaAsP-InGaAs: Difference between revisions
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|Comparing of this Cl2/H2 recipe with HBr recipe on e-beamed structures:[[Media:HBr vs Cl2 InP etch comparison Aurimas.pptx]] ''(By Aurimas Sakana @photonic (nov 2019)) | | | ||
*Comparing of this Cl2/H2 recipe with HBr recipe on e-beamed structures:[[Media:HBr vs Cl2 InP etch comparison Aurimas.pptx]] ''(By Aurimas Sakana @photonic (nov 2019)) | |||
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*A few parameter variations on the recipe, [[/InP etch with Cl2/H2/Ar| see results on this page!]] | |||
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