Specific Process Knowledge/Characterization/AFM: Atomic Force Microscopy: Difference between revisions

!style="background:silver; color:black" align="left"|Performance

|style="background:LightGrey; color:black"|Scan range xy

|style="background:WhiteSmoke; color:black"|Up to 90 µm square

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|style="background:LightGrey; color:black"|Scan range z

|style="background:WhiteSmoke; color:black"| Up to 13µm

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|style="background:LightGrey; color:black"|Vertical noise floor

|style="background:WhiteSmoke; color:black"|<30pm RMS

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|style="background:LightGrey; color:black"|X-Y position noise (closed loop)

|style="background:WhiteSmoke; color:black"|<0.15nm RMS

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|style="background:LightGrey; color:black"|Z sensor noise level(closed loop)

|style="background:WhiteSmoke; color:black"|35pm RMS  

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|style="background:LightGrey; color:black"|Integral nonlinearity(X-Y-Z)

|style="background:WhiteSmoke; color:black"|<0.5%

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|style="background:LightGrey; color:black"|X-Y position noise (closed loop)

|style="background:WhiteSmoke; color:black"|<0.15nm RMS

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|style="background:LightGrey; color:black"|Max. scan depth as a function of trench width W

|style="background:WhiteSmoke; color:black"|~1 for our standard probe. Can be improved to about 10 with the right probe

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!style="background:silver; color:black" align="left"|Hardware settings

|style="background:LightGrey; color:black"|Tip radius of curvature

|style="background:WhiteSmoke; color:black"|Standard probe: <12 nm

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|style="background:LightGrey; color:black"|Standard ScanAsyst mode Cantilever/tip

|style="background:WhiteSmoke; color:black"|[http://www.brukerafmprobes.com/p-3726-scanasyst-air.aspx ScanAsyst in Air]

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|style="background:LightGrey; color:black"|Standard Tapping mode Cantilevers/tips

|style="background:WhiteSmoke; color:black"|[http://www.nanoandmore.com/AFM-Probe-Tap300Al-G.html Tap300Al-G]

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|style="background:LightGrey; color:black"|High Aspect Ratio Cantilever/tip

|style="background:WhiteSmoke; color:black"|[http://www.nanoandmore.com/AFM-Probe-AR5-NCHR.html AR5-NCHR]

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|style="background:LightGrey; color:black"|Cantilevers/tips vendor

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*[http://www.brukerafmprobes.com Bruker]

!style="background:silver; color:black" align="left"|Substrates

|style="background:LightGrey; color:black"|Substrate size

|style="background:WhiteSmoke; color:black"|Up to 210mm in diameter and up to 15mm thick"

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|style="background:LightGrey; color:black"|Motorized stage (X-Y axis)

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*180mmx150mm inspection area

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| style="background:LightGrey; color:black"|Substrate material allowed

|style="background:WhiteSmoke; color:black"|In principle all materials

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