Specific Process Knowledge/Characterization/AFM: Atomic Force Microscopy/Workspaces

From LabAdviser
Jump to navigation Jump to search

Feedback to this page: click here

This page is written by Berit Herstrøm @ DTU Nanolab

What scanning mode, experiment/workspace and probe should I select

Roughness measurements Topographic measurements with no steep/abrupt steps Steep/abrupt steps but no high aspect ratio High aspect ratio measurements Large area fast scan
Recommended mode Roughness measurement can be done in both Contact, Tapping and ScanAsyst mode. We recommend ScanAsyst mode because of less chance of (non-uniform) deformation of the sample and less tip wear - and because of ease of use. However it also works fine in tapping mode. For Topographic measurements with no steep/abrupt steps we also recommend Tapping mode on most samples. Only on very soft samples (e.g. cells) we recommend ScanAsyst due to less chance of (non-uniform) deformation of the sample - or if you need QNM data. We mainly recommend Tapping mode because we experience less problems when the tip end is slightly broken. For Steep/abrupt steps but no high aspect ratio structures we still recommend Tapping mode unless you need need QNM data. For High aspect ratio measurements we recommend Tapping mode. We do not have experience with ScanAsyst therefore we recommend Tapping mode. For large scan areas where you prioritize to scan fast then you can use contact mode. Here you can scan with scan rate of up to 2.43 Hz
Recommended probes Tap150Al-G or ScanAsyst in air Tap150Al-G or ScanAsyst in air Tap150Al-G or ScanAsyst in air for ScanAsyst mode

Tap150Al-G or TAP300Al-G for Tapping mode

AR5T-NCHR or

FIB6-400A

SNL
Recommended experiment/Workspace

Check the user manual in LabManager

Check the user manaual in LabManager

Check the user manaual in LabManager TappingMode 300nm trench (for steps <~1µm)

Tappping mode in air - 6µm Deep Trench (for steps >1~µm)

Standard Contact mode

*By choosing the work space/experiment QNM in air (Mechanical properties - QNM in air) scanAsyst is included and so are the nanomechanical properties like modulus, adhesion, dissipation and deformation.


More information about de different modes

Contact, Tapping and Peak Force Tapping

Please flowing this link to down load the file from LabManager (Requires login):
Introduction to Bruker ScanAsyst and PeakForce tapping AFM technology

PeakForce tapping and quantitative nanomechanical mapping

Peak Force KPFM (Kelvin Probe Force Microscopy)

Evaluation of used probes

Box number and probe number User Initials Explanation SEM images Conclusion
Box1 no. 1 bghe A lot of triangles in the image Box1 no1 tilt0 26.jpgBox1 no1 tilt0ny2 56.jpg Tip end has broken off
Box1 no. 2 bghe/smurthy Round pillars became misshaped Box1 no2 tilt0ny2 55.jpg Tip end has broken off or maybe if was not good to begin with
Box1 no. 3 bghe/zhongli Force curve bad, could not get the tip off the surface Box1 no3 tilt0 28.jpgBox1 no3 tilt0 29.jpgBox1 no3 90dg 03.jpg Tip end has broken off
Box1 no. 4 mattod Used dirty sample, force curve very bad, tip probably broken Box1 no4 tilt21 10.jpg The hole cantilever has broken off
Box1 no. 5 mattod Tip broken during tip change Box1 no5 tilt21 20.jpg Tip/cantilever has been damaged
Box1 no. 6 abshir Bad force curve (fluctuates) Box1 no6 tilt0 34.jpgBox1 no6 tilt0 35.jpgBox1 no6 90dg 00.jpg Tip end has broken off
Box1 no. 7 bghe Was OK on large structures but they got larger Box1 no7 tilt0 32.jpgBox1 no7 tilt0 33.jpg
Box1 no. 8 mattod Bad force curve Box1 no8 tilt0 30.jpgBox1 no8 tilt0 31.jpg Tip end has broken off
Box1 no. 9 kabi Blunt tip . Definitely (triangles) Box1 no9 tilt0ny2 49.jpgBox1 no9 tilt21 17.jpg Tip end has broken off
Box1 no. 10 kabi Blunt tip. Definitely (triangles) Box1 no10 tilt0ny2 48.jpgBox1 no10 90dg 05.jpg Tip end has broken off
Box2 no. 1 mattod Bad force curve Box2 no1 tilt0ny2 46.jpgBox2 no1 tilt0ny2 47.jpgBox2 no1a 90dg 13.jpg Tip seems ok, or at least very close to okay
Box2 no. 2 mattod Broken tip Box2 no2 tilt0ny 44.jpgBox2 no2 tilt0ny 45.jpgBox2 no2 90dg 11.jpg It looks like the tip end has been contaminated
Box2 no. 3 bghe Got large triangle scanning the tip checker Box2 no3 90dg 07.jpg Tip end has broken off