Specific Process Knowledge/Lithography/Coaters: Difference between revisions

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 **AZ MiR 701 (29cps)
 **AZ 4562
+*Edge bead removal on novlac-based resist
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 *Coating of
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 * PGMEA for spinner bowl cleaning and vapor tip bath
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-* AR-P 6200.09 (CSAR)
+* AR-P 6200.0? (CSAR) for 2", 4", and 6"
-* AZ5214E resist
+* AZ5214E for 2", 4", and 6"
-* AZ MiR 701 (29cps)
+* AZ MiR 701 (29cps) for 4", and 6"
-* AZ4562 resist
+* AZ4562 for 4", and 6"
 * PGMEA solvent for edge bead removal, backside rinse, and spinner bowl cleaning
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 |style="background:LightGrey; color:black"|Manual dispense option
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-* syringe dispense
+* syringe dispense (60cc)
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 * no
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-* syringe dispense
+* syringe dispense (30cc)
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 * yes