Jump to content

Specific Process Knowledge/Lithography/Coaters: Difference between revisions

← Older editNewer edit →
VisualWikitext
Taran (talk | contribs)
DCH-Employees-701, NLAB-Employees-701, NLAB-LabmanagerAllUsers, NLAB-Nlab307-labadviser-users-34891
3,526 edits
Taran (talk | contribs)
DCH-Employees-701, NLAB-Employees-701, NLAB-LabmanagerAllUsers, NLAB-Nlab307-labadviser-users-34891
3,526 edits
Line 48: Line 48:
|colspan="2" style="background:WhiteSmoke; color:black"|
|colspan="2" style="background:WhiteSmoke; color:black"|
*Coating of E-beam resists
*Coating of E-beam resists
** CSAR, ZEP, PMMA/MMA, HSQ (FOx)
** CSAR, ZEP, PMMA/MMA, HSQ(FOx)
*Coating of UV resists
*Coating of UV resists
**AZ 5214E, AZ 4562, AZ MiR 701, AZ nLOF
**AZ5214E, AZ4562, AZMiR701, AZnLOF
*Coating of imprint resists
*Coating of imprint resists
|style="background:WhiteSmoke; color:black"|
|style="background:WhiteSmoke; color:black"|
Retrieved from "https://labadviser.nanolab.dtu.dk//index.php?title=Specific_Process_Knowledge/Lithography/Coaters"